The plasma generator 70 according to the fourth embodiment has been described on the above.

Hereinafter, a plasma generator 80 according to the fifth embodiment is described. The plasma generator 80 according to the fifth embodiment differs from the plasma generator 10 according to the first embodiment in that a light-shielding member is provided at the blowout outlet, and is common in other points. Accordingly, the different points will be mainly described, and the common points will be omitted or simplified in the following. In addition, the same symbol is assigned to the configuration common to the plasma generator 10 according to the first embodiment.

FIG. 16 is a cross-sectional view schematically illustrating a dielectric barrier plasma generator according to the fifth embodiment. As shown in FIG. 16, the plasma generator 80 is provided with the dielectric substrate 12, the high-voltage electrode 14 and the low-voltage electrode 20.

As shown in FIG. 16, a light-shielding member 82 is provided at the blowout outlet 30. The light-shielding member 82 includes a cavity 83 that allows the gas that has flown through the gas channel 25 to circulate. The cavity 83 is communicated with the gas channel 25. The cavity 83 of the light-shielding member 82 is provided at a right angle to the direction of the gas flow in the gas channel 25. This configuration prevents the light from the discharge in the gas channel 25 from radiating onto the object to be irradiated.