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Dielectric barrier plasma generator and plasma discharge starting method for dielectric barrier plasma generator

專利號(hào)
US12219688B2
公開日期
2025-02-04
申請(qǐng)人
Ushio Denki Kabushiki Kaisha（JP Tokyo）
發(fā)明人
Takahiro Hiraoka; Kensuke Nakamura; Takanori Samejima
IPC分類
H05H1/00; H05H1/24
技術(shù)領(lǐng)域
blowout,plasma,dielectric,electrode,voltage,outlet,gas,generator,substrate,in
地域： Tokyo

摘要

A dielectric barrier plasma generator includes: a dielectric substrate, a high-voltage electrode provided on a first surface of the dielectric substrate, a low-voltage electrode provided to face a second surface of the dielectric substrate, a power introduction section provided at a first end of the high-voltage electrode, a gas channel formed from a first end to a second end thereof between the dielectric substrate and the low-voltage electrode to allow gas to flow from the first end of the gas channel to the second end thereof, and a blowout outlet formed at the second end of the gas channel to blow out the gas that has flown through the gas channel and plasma that has been generated in the gas channel. The dielectric substrate includes a portion having a thickness being thinner when being closer to the blowout outlet.

說(shuō)明書

In the dielectric barrier plasma generator according to the present invention, since the dielectric substrate includes a portion having a thickness being thinner when being closer to the blowout outlet, the portion has a larger capacitance when being closer to the blowout outlet. Discharge occurs at a place where the voltage applied to gas exceeds its dielectric breakdown voltage. Hence, setting the slope of the thickness of the dielectric substrate in a manner in which the voltage applied to gas exceeds its dielectric breakdown voltage in the vicinity of the blowout outlet enables plasma to be generated in the vicinity of the blowout outlet. As a result, this configuration is capable of uniformly ejecting plasma from the entire region of the blowout outlet. In addition, generating plasma in the vicinity of the blowout outlet improves the plasma generation efficiency.

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