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Integrated chip with a gate structure disposed within a trench

專利號
US12219770B2
公開日期
2025-02-04
申請人
Taiwan Semiconductor Manufacturing Company, Ltd.(TW Hsinchu)
發(fā)明人
Yong-Sheng Huang; Ming Chyi Liu
IPC分類
H10B43/30; H01L21/28; H01L29/06; H01L29/08; H01L29/423; H01L29/792; H10B41/30; H10B43/40
技術(shù)領(lǐng)域
gate,dielectric,substrate,region,layer,102t1,102f,102t2,trench,drain
地域: Hsinchu

摘要

The present disclosure relates to an integrated chip comprising a substrate having a first pair of opposing sidewalls that define a trench. The trench extends into a front-side surface of the substrate. A first source/drain region is disposed along the front-side surface of the substrate. A second source/drain region is disposed along the front-side surface of the substrate. A gate structure is disposed within the trench and is arranged laterally between the first source/drain region and the second source/drain region. The gate structure fills the trench and extends along the first pair of opposing sidewalls to an upper surface of the substrate. A bottom surface of the gate structure is disposed below a bottom surface of the first source/drain region.

說明書

In various embodiments, the first memory cell 202a comprises a first source/drain region 104a that is disposed along the front-side surface 102f of the substrate 102. The second memory cell 202b comprises a third source/drain region 104c that is disposed along the front-side surface 102f of the substrate 102. Further, the first and second memory cells 202a-b share a second source/drain region 104b that is disposed laterally between the first and third source/drain regions 104a, 104c and is disposed along the front-side surface 102f of the substrate 102. In various embodiments, the second source/drain region 104b may be referred to as a common source/drain region. In further embodiments, the first memory cell 202a comprises the first gate structure 112a disposed laterally between the first and second source/drain regions 104a, 104b, and the second memory cell 202b comprises the second gate structure 112b disposed laterally between the second and third source/drain regions 104b, 104c. In various embodiments, the first, second, and third source/drain regions may comprise a second doping type (e.g., n-type) opposite the first doping type (e.g., p-type).

權(quán)利要求

1
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