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Method of fabricating semiconductor device

專利號(hào)
US12268028B2
公開日期
2025-04-01
申請(qǐng)人
UNITED MICROELECTRONICS CORP.(TW Hsin-Chu)
發(fā)明人
Po-Yu Yang
IPC分類
H10D64/01; H10D30/01; H10D30/47; H10D62/10; H10D64/23
技術(shù)領(lǐng)域
layer,electrode,extension,dielectric,vertical,barrier,may,channel,portion,be
地域: Hsin-Chu

摘要

A method of fabricating a semiconductor device includes the following steps. A substrate is provided. A semiconductor channel layer is formed on the substrate. A semiconductor barrier layer is formed on the semiconductor channel layer. An etching process is performed to expose a portion of the semiconductor channel layer. A dielectric layer is formed to cover the semiconductor barrier layer and the exposed semiconductor channel layer. A first electrode is formed after forming the dielectric layer, where the first electrode includes a body portion and a vertical extension portion, the body portion is electrically connected to the semiconductor barrier layer, and a bottom surface of the vertical extension portion is lower than a top surface of the semiconductor channel layer.

說(shuō)明書

FIG. 10 is a diagram showing the relationship between the electric field and the position in the semiconductor devices according to embodiments and comparative embodiments of the present disclosure. According to one embodiment of the present disclosure, the vertical length Lv of the vertical extension portion 126 in the semiconductor device 100-1 shown in FIG. 1 may be adjusted, and the impact ionization rate at various depths of the semiconductor device may be measured. The “position” shown in the vertical axis of FIG. 10 refers to a “vertical position”, and the position of “0” substantially corresponds to the top surface of the first electrode of the semiconductor device. When the value in the vertical axis becomes larger, the corresponding position becomes more close to the substrate. Referring to FIG. 10, the horizontal length of the horizontal extension electrode may be fixed at 1.5 μm, and the vertical length Lv of the vertical extension portion of the first electrode 120 may be set at 1 μm, 1.5 μm, and 2 μm, respectively. The corresponding curves are represented by the curve C1, the curve C2, and the curve C3, respectively. Referring to FIG. 10, when the vertical length of the vertical extension portion is longer, the peak position of the electric field may become deeper. However, when the bottom surface of the vertical extension portion is located in the semiconductor buffer layer and adjacent to the semiconductor channel layer, the peak intensity of the electric field may be the smallest (corresponding to curve C2). Therefore, by providing the vertical extension portion, the distribution of electric field may be modified so as to reduce the peak value of the electric field. Accordingly, the semiconductor device is less likely to generate impact ionization.

權(quán)利要求

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