Then, the planarization layer 160 may be patterned to form a contact hole exposing the source electrode SE or the drain electrode DE. In an embodiment, as illustrated in FIG. 14, the drain electrode DE may be exposed by the contact hole. However, the inventive concepts are not limited thereto, and in another embodiment, the source electrode SE may be exposed.

Then, a first electrode E1 electrically connected to the drain electrode DE may be formed on the planarization layer 160. For example, a metal layer may be formed on the planarization layer 160 and patterned to form the first electrode E1 in contact with the drain electrode DE.

In an embodiment, the first electrode E1 may be an anode of the light emitting element EE. However, the inventive concepts are not limited thereto, and in another embodiment, the first electrode E1 may be a cathode of the light emitting element EE. The first electrode E1 may be formed as a transmissive electrode or a reflective electrode depending on the emission type of the light emitting element EE. When the first electrode E1 is formed as the transmissive electrode, the first electrode E1 may include indium tin oxide (ITO), indium zinc oxide (IZO), zinc tin oxide (ZTO), indium oxide (In₂O₃), zinc oxide (ZnO), tin oxide (SnO₂), or the like. When the first electrode E1 is formed as the reflective electrode, the first electrode E1 may include gold (Au), silver (Ag), aluminum (Al), copper (Cu), nickel (Ni), platinum (Pt), magnesium (Mg), chromium (Cr), tungsten (W), molybdenum (Mo), titanium (Ti), or the like, and may have a laminated structure with the material used for the transmissive electrode.